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The Investigation of a SAW Oxygen Gas Sensor Operated at Room Temperature, Based on Nanostructured Zn(x)Fe(y)O Films

In this paper, we report a wireless gas sensor based on surface acoustic waves (SAW). For room temperature detection of oxygen gas, a novel nanostructured Zn(x)Fe(y)O gas-sensitive film was deposited on the surface of a SAW resonator by an oblique magnetron co-sputtering method. The measurements of...

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Detalles Bibliográficos
Autores principales:	Shu, Lin, Jiang, Tao, Xia, Yudong, Wang, Xuemin, Yan, Dawei, Wu, Weidong
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2019
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6650955/ https://www.ncbi.nlm.nih.gov/pubmed/31324036 http://dx.doi.org/10.3390/s19133025

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