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An Embedded Sensor System for Real-Time Detecting 5-DOF Error Motions of Rotary Stages

The geometric error motions of rotary stages greatly affect the accuracy of constructed machines such as machine tools, measuring instruments, and robots. In this paper, an embedded sensor system for real-time measurement of two radial and three angular error motions of a rotary stage is proposed, w...

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Detalles Bibliográficos
Autores principales: Lou, Zhi-Feng, Hao, Xiu-Peng, Cai, Yin-Di, Lu, Tien-Fu, Wang, Xiao-Dong, Fan, Kuang-Chao
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6651088/
https://www.ncbi.nlm.nih.gov/pubmed/31252562
http://dx.doi.org/10.3390/s19132855