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Atomically thin three-dimensional membranes of van der Waals semiconductors by wafer-scale growth
We report wafer-scale growth of atomically thin, three-dimensional (3D) van der Waals (vdW) semiconductor membranes. By controlling the growth kinetics in the near-equilibrium limit during metal-organic chemical vapor depositions of MoS(2) and WS(2) monolayer (ML) crystals, we have achieved conforma...
Autores principales: | , , , , , , , , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
American Association for the Advancement of Science
2019
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6660212/ https://www.ncbi.nlm.nih.gov/pubmed/31360767 http://dx.doi.org/10.1126/sciadv.aaw3180 |