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Memory Window and Endurance Improvement of Hf(0.5)Zr(0.5)O(2)-Based FeFETs with ZrO(2) Seed Layers Characterized by Fast Voltage Pulse Measurements
The HfO(2)-based ferroelectric field effect transistor (FeFET) with a metal/ferroelectric/insulator/semiconductor (MFIS) gate stack is currently being considered as a possible candidate for high-density and fast write speed non-volatile memory. Although the retention performance of the HfO(2)-based...
Autores principales: | , , , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Springer US
2019
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6660534/ https://www.ncbi.nlm.nih.gov/pubmed/31350697 http://dx.doi.org/10.1186/s11671-019-3063-2 |