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Growth of lithium hydride thin films from solutions: Towards solution atomic layer deposition of lithiated films
Lithiated thin films are necessary for the fabrication of novel solid-state batteries, including the electrodes and solid electrolytes. Physical vapour deposition and chemical vapour deposition can be used to deposit lithiated films. However, the issue of conformality on non-planar substrates with l...
Autores principales: | , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Beilstein-Institut
2019
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6664408/ https://www.ncbi.nlm.nih.gov/pubmed/31431856 http://dx.doi.org/10.3762/bjnano.10.142 |