In-Lens Band-Pass Filter for Secondary Electrons in Ultrahigh Resolution SEM

Scanning electron microscopes come equipped with different types of detectors for the collection of signal electrons emitted from samples. In-lens detection systems mostly consist of several auxiliary electrodes that help electrons to travel in a direction towards the detector. This paper aims to sh...

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Detalles Bibliográficos
Autores principales: Konvalina, Ivo, Mika, Filip, Krátký, Stanislav, Materna Mikmeková, Eliška, Müllerová, Ilona
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6679021/
https://www.ncbi.nlm.nih.gov/pubmed/31330942
http://dx.doi.org/10.3390/ma12142307

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6679021/
https://www.ncbi.nlm.nih.gov/pubmed/31330942
http://dx.doi.org/10.3390/ma12142307

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