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In-Lens Band-Pass Filter for Secondary Electrons in Ultrahigh Resolution SEM
Scanning electron microscopes come equipped with different types of detectors for the collection of signal electrons emitted from samples. In-lens detection systems mostly consist of several auxiliary electrodes that help electrons to travel in a direction towards the detector. This paper aims to sh...
Autores principales: | Konvalina, Ivo, Mika, Filip, Krátký, Stanislav, Materna Mikmeková, Eliška, Müllerová, Ilona |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2019
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6679021/ https://www.ncbi.nlm.nih.gov/pubmed/31330942 http://dx.doi.org/10.3390/ma12142307 |
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