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Improvement of Thermal Cycling Resistance of Al(x)Si(1−x)N Coatings on Cu Substrates by Optimizing Al/Si Ratio

The effect of the elemental composition of Al(x)Si(1−x)N coatings deposited on Cu substrates by magnetron sputtering on their structure, mechanical properties and thermal cycling performance is studied. The coatings with Al-Si-N solid solution, two-phase (Al(x)Si(1−x)N nanocrystallites embedded in t...

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Detalles Bibliográficos
Autores principales: Panin, Alexey, Shugurov, Artur, Kazachenok, Marina, Sergeev, Victor
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6679045/
https://www.ncbi.nlm.nih.gov/pubmed/31336920
http://dx.doi.org/10.3390/ma12142249