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Improvement of Thermal Cycling Resistance of Al(x)Si(1−x)N Coatings on Cu Substrates by Optimizing Al/Si Ratio
The effect of the elemental composition of Al(x)Si(1−x)N coatings deposited on Cu substrates by magnetron sputtering on their structure, mechanical properties and thermal cycling performance is studied. The coatings with Al-Si-N solid solution, two-phase (Al(x)Si(1−x)N nanocrystallites embedded in t...
Autores principales: | , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2019
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6679045/ https://www.ncbi.nlm.nih.gov/pubmed/31336920 http://dx.doi.org/10.3390/ma12142249 |