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Methylated Poly(ethylene)imine Modified Capacitive Micromachined Ultrasonic Transducer for Measurements of CO(2) and SO(2) in Their Mixtures
A gravimetric gas detection device based on surface functionalized Capacitive Micromachined Ultrasound Transducers (CMUTs) was designed, fabricated and tested for detection of carbon dioxide (CO(2)) and sulfur dioxide (SO(2)) mixtures in nitrogen. The created measurement setup of continuous data col...
Autores principales: | , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2019
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6679524/ https://www.ncbi.nlm.nih.gov/pubmed/31340518 http://dx.doi.org/10.3390/s19143236 |