Two Degree-of-Freedom Fiber-Coupled Heterodyne Grating Interferometer with Milli-Radian Operating Range of Rotation

In the displacement measurement of the wafer stage in lithography machines, signal quality is affected by the relative angular position between the encoder head and the grating. In this study, a two-degree-of-freedom fiber-coupled heterodyne grating interferometer with large operating range of rotat...

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Detalles Bibliográficos
Autores principales: Yang, Fuzhong, Zhang, Ming, Zhu, Yu, Ye, Weinan, Wang, Leijie, Xia, Yizhou
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6679590/
https://www.ncbi.nlm.nih.gov/pubmed/31336608
http://dx.doi.org/10.3390/s19143219

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6679590/
https://www.ncbi.nlm.nih.gov/pubmed/31336608
http://dx.doi.org/10.3390/s19143219

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