Analysis on Characteristics of ZnO Surface Acoustic Wave with and without Micro-Structures

In this paper, we fabricate a surface acoustic wave (SAW) device with micro-structures on a zinc oxide (ZnO) thin film and measure its signal response. The manufacturing processes of the SAW device include the fabrication of micro-structures of a SAW element and its interdigital transducer by silico...

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Detalles Bibliográficos
Autores principales: Huang, Huei-Yu, Chiang, Hsi-Jen, Wu, Ching-Zong, Lin, Yi, Shen, Yung-Kang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6680403/
https://www.ncbi.nlm.nih.gov/pubmed/31262083
http://dx.doi.org/10.3390/mi10070434

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6680403/
https://www.ncbi.nlm.nih.gov/pubmed/31262083
http://dx.doi.org/10.3390/mi10070434

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