Design and Fabrication of a Push-Pull Electrostatic Actuated Cantilever Waveguide Scanner

The paper presents a novel fully integrated MEMS-based non-resonating operated 2D mechanical scanning system using a 1D push-pull actuator. Details of the design, fabrication and tests performed are presented. The current design utilizes an integrated electrostatic push-pull actuator and a SU-8 rib...

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Detalles Bibliográficos
Autores principales: Wang, Wei-Chih, Gu, Kebin, Tsui, ChiLeung
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6680476/
https://www.ncbi.nlm.nih.gov/pubmed/31261955
http://dx.doi.org/10.3390/mi10070432

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6680476/
https://www.ncbi.nlm.nih.gov/pubmed/31261955
http://dx.doi.org/10.3390/mi10070432

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