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Design and Fabrication of a Push-Pull Electrostatic Actuated Cantilever Waveguide Scanner

The paper presents a novel fully integrated MEMS-based non-resonating operated 2D mechanical scanning system using a 1D push-pull actuator. Details of the design, fabrication and tests performed are presented. The current design utilizes an integrated electrostatic push-pull actuator and a SU-8 rib...

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Detalles Bibliográficos
Autores principales: Wang, Wei-Chih, Gu, Kebin, Tsui, ChiLeung
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6680476/
https://www.ncbi.nlm.nih.gov/pubmed/31261955
http://dx.doi.org/10.3390/mi10070432
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author Wang, Wei-Chih
Gu, Kebin
Tsui, ChiLeung
author_facet Wang, Wei-Chih
Gu, Kebin
Tsui, ChiLeung
author_sort Wang, Wei-Chih
collection PubMed
description The paper presents a novel fully integrated MEMS-based non-resonating operated 2D mechanical scanning system using a 1D push-pull actuator. Details of the design, fabrication and tests performed are presented. The current design utilizes an integrated electrostatic push-pull actuator and a SU-8 rib waveguide with a large core cross section (4 μm in height and 20 μm in width) in broadband single mode operation (λ = 0.4 μm to 0.65 μm). We have successfully demonstrated a 2D scanning motion using non- resonating operation with 201 Hz in vertical direction and 20 Hz in horizontal direction. This non-resonating scanner system has achieved a field of view (FOV) of 0.019 to 0.072 radians in vertical and horizontal directions, with the advantage of overcoming its frequency shift caused by fabrication uncertainties. In addition, we observed two fundamental resonances at 201 and 536 Hz in the vertical and horizontal directions with corresponding displacements of 130 and 19 μm, or 0.072 and 0.0105 radian field of view operating at a +150 V input. A gradient index (GRIN) lens is placed at the end of the waveguide to focus the diverging beam output from the waveguide and a 20 μm beam diameter is observed at the focal plane. The transmission efficiency of the waveguide is slightly low (~10%) and slight tensile residual stress can be observed at the cantilever portion of the waveguide due to inherent imperfections in the fabrication process.
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spelling pubmed-66804762019-08-09 Design and Fabrication of a Push-Pull Electrostatic Actuated Cantilever Waveguide Scanner Wang, Wei-Chih Gu, Kebin Tsui, ChiLeung Micromachines (Basel) Article The paper presents a novel fully integrated MEMS-based non-resonating operated 2D mechanical scanning system using a 1D push-pull actuator. Details of the design, fabrication and tests performed are presented. The current design utilizes an integrated electrostatic push-pull actuator and a SU-8 rib waveguide with a large core cross section (4 μm in height and 20 μm in width) in broadband single mode operation (λ = 0.4 μm to 0.65 μm). We have successfully demonstrated a 2D scanning motion using non- resonating operation with 201 Hz in vertical direction and 20 Hz in horizontal direction. This non-resonating scanner system has achieved a field of view (FOV) of 0.019 to 0.072 radians in vertical and horizontal directions, with the advantage of overcoming its frequency shift caused by fabrication uncertainties. In addition, we observed two fundamental resonances at 201 and 536 Hz in the vertical and horizontal directions with corresponding displacements of 130 and 19 μm, or 0.072 and 0.0105 radian field of view operating at a +150 V input. A gradient index (GRIN) lens is placed at the end of the waveguide to focus the diverging beam output from the waveguide and a 20 μm beam diameter is observed at the focal plane. The transmission efficiency of the waveguide is slightly low (~10%) and slight tensile residual stress can be observed at the cantilever portion of the waveguide due to inherent imperfections in the fabrication process. MDPI 2019-06-29 /pmc/articles/PMC6680476/ /pubmed/31261955 http://dx.doi.org/10.3390/mi10070432 Text en © 2019 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Wang, Wei-Chih
Gu, Kebin
Tsui, ChiLeung
Design and Fabrication of a Push-Pull Electrostatic Actuated Cantilever Waveguide Scanner
title Design and Fabrication of a Push-Pull Electrostatic Actuated Cantilever Waveguide Scanner
title_full Design and Fabrication of a Push-Pull Electrostatic Actuated Cantilever Waveguide Scanner
title_fullStr Design and Fabrication of a Push-Pull Electrostatic Actuated Cantilever Waveguide Scanner
title_full_unstemmed Design and Fabrication of a Push-Pull Electrostatic Actuated Cantilever Waveguide Scanner
title_short Design and Fabrication of a Push-Pull Electrostatic Actuated Cantilever Waveguide Scanner
title_sort design and fabrication of a push-pull electrostatic actuated cantilever waveguide scanner
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6680476/
https://www.ncbi.nlm.nih.gov/pubmed/31261955
http://dx.doi.org/10.3390/mi10070432
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