A Resonant Pressure Sensor Based upon Electrostatically Comb Driven and Piezoresistively Sensed Lateral Resonators

This study proposes a microfabricated resonant pressure sensor in which a pair of double-ended tuning forks were utilized as resonators where comb electrodes and single-crystal silicon-based piezoresistors were used for electrostatic excitation and piezoresistive detection, respectively. In operatio...

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Detalles Bibliográficos
Autores principales: Shi, Xiaoqing, Zhang, Sen, Chen, Deyong, Wang, Junbo, Chen, Jian, Xie, Bo, Lu, Yulan, Li, Yadong
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6680778/
https://www.ncbi.nlm.nih.gov/pubmed/31288381
http://dx.doi.org/10.3390/mi10070460

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6680778/
https://www.ncbi.nlm.nih.gov/pubmed/31288381
http://dx.doi.org/10.3390/mi10070460

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