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On-Chip Integration of Pressure Plus 2-Axis (X/Z) Acceleration Composite TPMS Sensors with a Single-Sided Bulk-Micromachining Technique
A novel on-chip integration of pressure plus 2-axis (X/Z) acceleration composite sensors for upgraded production of automobile tire pressure monitoring system (TPMS) is proposed, developed, and characterized. Herein, the X-axis accelerometer is with the cantilever beam-mass structure and is used for...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2019
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6680854/ https://www.ncbi.nlm.nih.gov/pubmed/31311131 http://dx.doi.org/10.3390/mi10070473 |