The Hybrid Fabrication Process of Metal/Silicon Composite Structure for MEMS S&A Device

The micro-electromechanical system (MEMS) safety-and-arming (S&A) device has the features of integration and miniaturization, which is one of the important directions of weapon development. Confined by the fabrication process, the silicon-based devices are too fragile, and the metal-based device...

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Detalles Bibliográficos
Autores principales: Hu, Tengjiang, Fang, Kuang, Zhang, Zhiming, Jiang, Xiaohua, Zhao, Yulong
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6681024/
https://www.ncbi.nlm.nih.gov/pubmed/31337075
http://dx.doi.org/10.3390/mi10070469

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6681024/
https://www.ncbi.nlm.nih.gov/pubmed/31337075
http://dx.doi.org/10.3390/mi10070469

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