Cargando…
The Hybrid Fabrication Process of Metal/Silicon Composite Structure for MEMS S&A Device
The micro-electromechanical system (MEMS) safety-and-arming (S&A) device has the features of integration and miniaturization, which is one of the important directions of weapon development. Confined by the fabrication process, the silicon-based devices are too fragile, and the metal-based device...
| Autores principales: | , , , , |
|---|---|
| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2019
|
| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6681024/ https://www.ncbi.nlm.nih.gov/pubmed/31337075 http://dx.doi.org/10.3390/mi10070469 |