Tunable diameter and spacing of double Ge quantum dots using highly-controllable spacers and selective oxidation of SiGe

We report the novel tunability of the diameters and spacings of paired Ge double quantum dots (DQDs) using nano-spacer technology in combination with selective oxidation of Si(0.85)Ge(0.15) at high temperature. Pairs of spherical-shaped Ge QDs were formed by the selective oxidation of poly-SiGe spac...

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Detalles Bibliográficos
Autores principales: Huang, Tsung-Lin, Peng, Kang-Ping, Chen, Ching-Lun, Lin, Horng-Chih, George, Tom, Li, Pei-Wen
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6683190/
https://www.ncbi.nlm.nih.gov/pubmed/31383902
http://dx.doi.org/10.1038/s41598-019-47806-0

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6683190/
https://www.ncbi.nlm.nih.gov/pubmed/31383902
http://dx.doi.org/10.1038/s41598-019-47806-0

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