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Investigation of antireflective and hydrophobic properties in polycrystalline GaN films with dual porosity produced by CVD
We optimized the deposition conditions of polycrystalline nanoporousGaN coatings produced by Chemical Vapor Deposition on Si substrates, by exploring the effect produced by the Ga holder shape, the initial amount of Ga, the reaction deposition time and the metallic catalyst used. Such polycrystallin...
Autores principales: | , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group UK
2019
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6690916/ https://www.ncbi.nlm.nih.gov/pubmed/31406168 http://dx.doi.org/10.1038/s41598-019-48202-4 |