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Investigation of antireflective and hydrophobic properties in polycrystalline GaN films with dual porosity produced by CVD

We optimized the deposition conditions of polycrystalline nanoporousGaN coatings produced by Chemical Vapor Deposition on Si substrates, by exploring the effect produced by the Ga holder shape, the initial amount of Ga, the reaction deposition time and the metallic catalyst used. Such polycrystallin...

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Detalles Bibliográficos
Autores principales:	Mena Gómez, Josue, Carvajal, Joan J., Bilousov, Oleksandr, Díaz, Francesc, Aguiló, Magdalena
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Nature Publishing Group UK 2019
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6690916/ https://www.ncbi.nlm.nih.gov/pubmed/31406168 http://dx.doi.org/10.1038/s41598-019-48202-4

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