Thermo-Electro-Mechanical Simulation of Semiconductor Metal Oxide Gas Sensors

There is a growing demand in the semiconductor industry to integrate many functionalities on a single portable device. The integration of sensor fabrication with the mature CMOS technology has made this level of integration a reality. However, sensors still require calibration and optimization befor...

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Detalles Bibliográficos
Autores principales: Filipovic, Lado, Selberherr, Siegfried
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6695634/
https://www.ncbi.nlm.nih.gov/pubmed/31357746
http://dx.doi.org/10.3390/ma12152410

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6695634/
https://www.ncbi.nlm.nih.gov/pubmed/31357746
http://dx.doi.org/10.3390/ma12152410

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