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Thermo-Electro-Mechanical Simulation of Semiconductor Metal Oxide Gas Sensors

There is a growing demand in the semiconductor industry to integrate many functionalities on a single portable device. The integration of sensor fabrication with the mature CMOS technology has made this level of integration a reality. However, sensors still require calibration and optimization befor...

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Detalles Bibliográficos
Autores principales: Filipovic, Lado, Selberherr, Siegfried
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6695634/
https://www.ncbi.nlm.nih.gov/pubmed/31357746
http://dx.doi.org/10.3390/ma12152410
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author Filipovic, Lado
Selberherr, Siegfried
author_facet Filipovic, Lado
Selberherr, Siegfried
author_sort Filipovic, Lado
collection PubMed
description There is a growing demand in the semiconductor industry to integrate many functionalities on a single portable device. The integration of sensor fabrication with the mature CMOS technology has made this level of integration a reality. However, sensors still require calibration and optimization before full integration. For this, modeling and simulation is essential, since attempting new, innovative designs in a laboratory requires a long time and expensive tests. In this manuscript we address aspects for the modeling and simulation of semiconductor metal oxide gas sensors, devices which have the highest potential for integration because of their CMOS-friendly fabrication capability and low operating power. We analyze recent advancements using FEM models to simulate the thermo-electro-mechanical behavior of the sensors. These simulations are essentials to calibrate the design choices and ensure low operating power and improve reliability. The primary consumer of power is a microheater which is essential to heat the sensing film to appropriately high temperatures in order to initiate the sensing mechanism. Electro-thermal models to simulate its operation are presented here, using FEM and the Cauer network model. We show that the simpler Cauer model, which uses an electrical circuit to model the thermo-electrical behavior, can efficiently reproduce experimental observations.
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spelling pubmed-66956342019-09-05 Thermo-Electro-Mechanical Simulation of Semiconductor Metal Oxide Gas Sensors Filipovic, Lado Selberherr, Siegfried Materials (Basel) Article There is a growing demand in the semiconductor industry to integrate many functionalities on a single portable device. The integration of sensor fabrication with the mature CMOS technology has made this level of integration a reality. However, sensors still require calibration and optimization before full integration. For this, modeling and simulation is essential, since attempting new, innovative designs in a laboratory requires a long time and expensive tests. In this manuscript we address aspects for the modeling and simulation of semiconductor metal oxide gas sensors, devices which have the highest potential for integration because of their CMOS-friendly fabrication capability and low operating power. We analyze recent advancements using FEM models to simulate the thermo-electro-mechanical behavior of the sensors. These simulations are essentials to calibrate the design choices and ensure low operating power and improve reliability. The primary consumer of power is a microheater which is essential to heat the sensing film to appropriately high temperatures in order to initiate the sensing mechanism. Electro-thermal models to simulate its operation are presented here, using FEM and the Cauer network model. We show that the simpler Cauer model, which uses an electrical circuit to model the thermo-electrical behavior, can efficiently reproduce experimental observations. MDPI 2019-07-28 /pmc/articles/PMC6695634/ /pubmed/31357746 http://dx.doi.org/10.3390/ma12152410 Text en © 2019 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Filipovic, Lado
Selberherr, Siegfried
Thermo-Electro-Mechanical Simulation of Semiconductor Metal Oxide Gas Sensors
title Thermo-Electro-Mechanical Simulation of Semiconductor Metal Oxide Gas Sensors
title_full Thermo-Electro-Mechanical Simulation of Semiconductor Metal Oxide Gas Sensors
title_fullStr Thermo-Electro-Mechanical Simulation of Semiconductor Metal Oxide Gas Sensors
title_full_unstemmed Thermo-Electro-Mechanical Simulation of Semiconductor Metal Oxide Gas Sensors
title_short Thermo-Electro-Mechanical Simulation of Semiconductor Metal Oxide Gas Sensors
title_sort thermo-electro-mechanical simulation of semiconductor metal oxide gas sensors
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6695634/
https://www.ncbi.nlm.nih.gov/pubmed/31357746
http://dx.doi.org/10.3390/ma12152410
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