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Thermo-Electro-Mechanical Simulation of Semiconductor Metal Oxide Gas Sensors
There is a growing demand in the semiconductor industry to integrate many functionalities on a single portable device. The integration of sensor fabrication with the mature CMOS technology has made this level of integration a reality. However, sensors still require calibration and optimization befor...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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MDPI
2019
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6695634/ https://www.ncbi.nlm.nih.gov/pubmed/31357746 http://dx.doi.org/10.3390/ma12152410 |