Effect of Imperfections Due to Material Heterogeneity on the Offset of Polysilicon MEMS Structures

Monte Carlo analyses on statistical volume elements allow quantifying the effect of polycrystalline morphology, in terms of grain topology and orientation, on the scattering of the elastic properties of polysilicon springs. The results are synthesized through statistical (lognormal) distributions de...

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Detalles Bibliográficos
Autores principales: Ghisi, Aldo, Mariani, Stefano
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6696466/
https://www.ncbi.nlm.nih.gov/pubmed/31344872
http://dx.doi.org/10.3390/s19153256

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6696466/
https://www.ncbi.nlm.nih.gov/pubmed/31344872
http://dx.doi.org/10.3390/s19153256

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