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Effect of Imperfections Due to Material Heterogeneity on the Offset of Polysilicon MEMS Structures
Monte Carlo analyses on statistical volume elements allow quantifying the effect of polycrystalline morphology, in terms of grain topology and orientation, on the scattering of the elastic properties of polysilicon springs. The results are synthesized through statistical (lognormal) distributions de...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2019
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6696466/ https://www.ncbi.nlm.nih.gov/pubmed/31344872 http://dx.doi.org/10.3390/s19153256 |