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Resolution enhancement in scanning electron microscopy using deep learning

We report resolution enhancement in scanning electron microscopy (SEM) images using a generative adversarial network. We demonstrate the veracity of this deep learning-based super-resolution technique by inferring unresolved features in low-resolution SEM images and comparing them with the accuratel...

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Detalles Bibliográficos
Autores principales:	de Haan, Kevin, Ballard, Zachary S., Rivenson, Yair, Wu, Yichen, Ozcan, Aydogan
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Nature Publishing Group UK 2019
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6700066/ https://www.ncbi.nlm.nih.gov/pubmed/31427691 http://dx.doi.org/10.1038/s41598-019-48444-2

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