Design and Mechanical Sensitivity Analysis of a MEMS Tuning Fork Gyroscope with an Anchored Leverage Mechanism

This paper presents the design and analysis of a new micro-electro-mechanical system (MEMS) tuning fork gyroscope (TFG), which can effectively improve the mechanical sensitivity of the gyroscope sense-mode by the designed leverage mechanism. A micromachined TFG with an anchored leverage mechanism is...

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Detalles Bibliográficos
Autores principales: Li, Zezhang, Gao, Shiqiao, Jin, Lei, Liu, Haipeng, Guan, Yanwei, Peng, Shigang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6719213/
https://www.ncbi.nlm.nih.gov/pubmed/31394850
http://dx.doi.org/10.3390/s19163455

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6719213/
https://www.ncbi.nlm.nih.gov/pubmed/31394850
http://dx.doi.org/10.3390/s19163455

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