Thermal Drift Investigation of an SOI-Based MEMS Capacitive Sensor with an Asymmetric Structure

High-precision, low-temperature-sensitive microelectromechanical system (MEMS) capacitive accelerometers are widely used in aerospace, automotive, and navigation systems. An analytical study of the temperature drift of bias (TDB) and temperature drift of scale factor (TDSF) for an asymmetric comb ca...

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Detalles Bibliográficos
Autores principales: Li, Haiwang, Zhai, Yanxin, Tao, Zhi, Gui, Yingxuan, Tan, Xiao
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6720874/
https://www.ncbi.nlm.nih.gov/pubmed/31408966
http://dx.doi.org/10.3390/s19163522

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6720874/
https://www.ncbi.nlm.nih.gov/pubmed/31408966
http://dx.doi.org/10.3390/s19163522

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