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Thermal Drift Investigation of an SOI-Based MEMS Capacitive Sensor with an Asymmetric Structure
High-precision, low-temperature-sensitive microelectromechanical system (MEMS) capacitive accelerometers are widely used in aerospace, automotive, and navigation systems. An analytical study of the temperature drift of bias (TDB) and temperature drift of scale factor (TDSF) for an asymmetric comb ca...
Autores principales: | , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2019
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6720874/ https://www.ncbi.nlm.nih.gov/pubmed/31408966 http://dx.doi.org/10.3390/s19163522 |
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author | Li, Haiwang Zhai, Yanxin Tao, Zhi Gui, Yingxuan Tan, Xiao |
author_facet | Li, Haiwang Zhai, Yanxin Tao, Zhi Gui, Yingxuan Tan, Xiao |
author_sort | Li, Haiwang |
collection | PubMed |
description | High-precision, low-temperature-sensitive microelectromechanical system (MEMS) capacitive accelerometers are widely used in aerospace, automotive, and navigation systems. An analytical study of the temperature drift of bias (TDB) and temperature drift of scale factor (TDSF) for an asymmetric comb capacitive accelerometer is presented in this paper. A five-layer model is established for the equivalent expansion ratio in the TDB and TDSF formulas, and the results calculated by the weighted average of thickness and elasticity modulus method are closest to the results of the numerical simulation. The analytical formulas of TDB and TDSF for an asymmetric structure are obtained. For an asymmetric structure, TDB is only related to thermal deformation and fabrication error. Additionally, half of the fixed electrode distance is not included in the expressions of [Formula: see text] and [Formula: see text] for asymmetric structures, thus resulting in the TDSF of the asymmetric structure being smaller compared to a symmetric structure with the same structural parameters. The TDSF of the symmetric structure is [−200.2 ppm/°C, −261.6 ppm/°C], while the results of the asymmetric structure are [−11.004 ppm/°C, −72.404 ppm/°C] under the same set of parameters. The parameters of the optimal asymmetric structure are obtained for fabrication guidance using numerical methods. In the experiment, the TDSF and TDB of the packaged structure and the non-packaged structure are compared, and a significant effect of the package on the signal output is found. The TDB is reduced from 3000 to 60 μg/°C, while the TDSF is reduced from 3000 to 140 ppm/°C. |
format | Online Article Text |
id | pubmed-6720874 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2019 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-67208742019-09-10 Thermal Drift Investigation of an SOI-Based MEMS Capacitive Sensor with an Asymmetric Structure Li, Haiwang Zhai, Yanxin Tao, Zhi Gui, Yingxuan Tan, Xiao Sensors (Basel) Article High-precision, low-temperature-sensitive microelectromechanical system (MEMS) capacitive accelerometers are widely used in aerospace, automotive, and navigation systems. An analytical study of the temperature drift of bias (TDB) and temperature drift of scale factor (TDSF) for an asymmetric comb capacitive accelerometer is presented in this paper. A five-layer model is established for the equivalent expansion ratio in the TDB and TDSF formulas, and the results calculated by the weighted average of thickness and elasticity modulus method are closest to the results of the numerical simulation. The analytical formulas of TDB and TDSF for an asymmetric structure are obtained. For an asymmetric structure, TDB is only related to thermal deformation and fabrication error. Additionally, half of the fixed electrode distance is not included in the expressions of [Formula: see text] and [Formula: see text] for asymmetric structures, thus resulting in the TDSF of the asymmetric structure being smaller compared to a symmetric structure with the same structural parameters. The TDSF of the symmetric structure is [−200.2 ppm/°C, −261.6 ppm/°C], while the results of the asymmetric structure are [−11.004 ppm/°C, −72.404 ppm/°C] under the same set of parameters. The parameters of the optimal asymmetric structure are obtained for fabrication guidance using numerical methods. In the experiment, the TDSF and TDB of the packaged structure and the non-packaged structure are compared, and a significant effect of the package on the signal output is found. The TDB is reduced from 3000 to 60 μg/°C, while the TDSF is reduced from 3000 to 140 ppm/°C. MDPI 2019-08-12 /pmc/articles/PMC6720874/ /pubmed/31408966 http://dx.doi.org/10.3390/s19163522 Text en © 2019 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article Li, Haiwang Zhai, Yanxin Tao, Zhi Gui, Yingxuan Tan, Xiao Thermal Drift Investigation of an SOI-Based MEMS Capacitive Sensor with an Asymmetric Structure |
title | Thermal Drift Investigation of an SOI-Based MEMS Capacitive Sensor with an Asymmetric Structure |
title_full | Thermal Drift Investigation of an SOI-Based MEMS Capacitive Sensor with an Asymmetric Structure |
title_fullStr | Thermal Drift Investigation of an SOI-Based MEMS Capacitive Sensor with an Asymmetric Structure |
title_full_unstemmed | Thermal Drift Investigation of an SOI-Based MEMS Capacitive Sensor with an Asymmetric Structure |
title_short | Thermal Drift Investigation of an SOI-Based MEMS Capacitive Sensor with an Asymmetric Structure |
title_sort | thermal drift investigation of an soi-based mems capacitive sensor with an asymmetric structure |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6720874/ https://www.ncbi.nlm.nih.gov/pubmed/31408966 http://dx.doi.org/10.3390/s19163522 |
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