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Thermal Drift Investigation of an SOI-Based MEMS Capacitive Sensor with an Asymmetric Structure
High-precision, low-temperature-sensitive microelectromechanical system (MEMS) capacitive accelerometers are widely used in aerospace, automotive, and navigation systems. An analytical study of the temperature drift of bias (TDB) and temperature drift of scale factor (TDSF) for an asymmetric comb ca...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2019
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6720874/ https://www.ncbi.nlm.nih.gov/pubmed/31408966 http://dx.doi.org/10.3390/s19163522 |