Positioning Error Analysis and Control of a Piezo-Driven 6-DOF Micro-Positioner

This paper presents a positioning error model and a control compensation scheme for a six-degree-of-freedom (6-DOF) micro-positioner based on a compliant mechanism and piezoelectric actuators (PZT). The positioning error model is established by means of the kinematic model of the compliant mechanism...

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Detalles Bibliográficos
Autores principales: Lin, Chao, Zheng, Shan, Li, Pingyang, Shen, Zhonglei, Wang, Shuang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6722792/
https://www.ncbi.nlm.nih.gov/pubmed/31426503
http://dx.doi.org/10.3390/mi10080542

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6722792/
https://www.ncbi.nlm.nih.gov/pubmed/31426503
http://dx.doi.org/10.3390/mi10080542

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