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Positioning Error Analysis and Control of a Piezo-Driven 6-DOF Micro-Positioner
This paper presents a positioning error model and a control compensation scheme for a six-degree-of-freedom (6-DOF) micro-positioner based on a compliant mechanism and piezoelectric actuators (PZT). The positioning error model is established by means of the kinematic model of the compliant mechanism...
Autores principales: | , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2019
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6722792/ https://www.ncbi.nlm.nih.gov/pubmed/31426503 http://dx.doi.org/10.3390/mi10080542 |
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author | Lin, Chao Zheng, Shan Li, Pingyang Shen, Zhonglei Wang, Shuang |
author_facet | Lin, Chao Zheng, Shan Li, Pingyang Shen, Zhonglei Wang, Shuang |
author_sort | Lin, Chao |
collection | PubMed |
description | This paper presents a positioning error model and a control compensation scheme for a six-degree-of-freedom (6-DOF) micro-positioner based on a compliant mechanism and piezoelectric actuators (PZT). The positioning error model is established by means of the kinematic model of the compliant mechanism and complete differential coefficient theory, which includes the relationships between three typical errors (hysteresis, machining and measuring errors) and the total positioning error. The quantitative analysis of three errors is demonstrated through several experimental studies. Afterwards, an inverse Presiach model-based feedforward compensation of the hysteresis nonlinearity is employed by the control scheme, combined with a proportional-integral-derivative (PID) feedback controller for the compensation of machining and measuring errors. Moreover, a back propagation neural network PID (BP-PID) controller and a cerebellar model articulation controller neural network PID (CMAC-PID) controller are also adopted and compared to obtain optimal control. Taking the translational motion along the X axis as an example, the positioning errors are sharply reduced by the inverse hysteresis model with the maximum error of 12.76% and a root-mean-square error of 4.09%. In combination with the CMAC-PID controller, the errors are decreased to 0.63% and 0.23%, respectively. Hence, simulated and experimental results reveal that the proposed approach can improve the positioning accuracy of 6-DOF for the micro-positioner. |
format | Online Article Text |
id | pubmed-6722792 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2019 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-67227922019-09-10 Positioning Error Analysis and Control of a Piezo-Driven 6-DOF Micro-Positioner Lin, Chao Zheng, Shan Li, Pingyang Shen, Zhonglei Wang, Shuang Micromachines (Basel) Article This paper presents a positioning error model and a control compensation scheme for a six-degree-of-freedom (6-DOF) micro-positioner based on a compliant mechanism and piezoelectric actuators (PZT). The positioning error model is established by means of the kinematic model of the compliant mechanism and complete differential coefficient theory, which includes the relationships between three typical errors (hysteresis, machining and measuring errors) and the total positioning error. The quantitative analysis of three errors is demonstrated through several experimental studies. Afterwards, an inverse Presiach model-based feedforward compensation of the hysteresis nonlinearity is employed by the control scheme, combined with a proportional-integral-derivative (PID) feedback controller for the compensation of machining and measuring errors. Moreover, a back propagation neural network PID (BP-PID) controller and a cerebellar model articulation controller neural network PID (CMAC-PID) controller are also adopted and compared to obtain optimal control. Taking the translational motion along the X axis as an example, the positioning errors are sharply reduced by the inverse hysteresis model with the maximum error of 12.76% and a root-mean-square error of 4.09%. In combination with the CMAC-PID controller, the errors are decreased to 0.63% and 0.23%, respectively. Hence, simulated and experimental results reveal that the proposed approach can improve the positioning accuracy of 6-DOF for the micro-positioner. MDPI 2019-08-17 /pmc/articles/PMC6722792/ /pubmed/31426503 http://dx.doi.org/10.3390/mi10080542 Text en © 2019 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article Lin, Chao Zheng, Shan Li, Pingyang Shen, Zhonglei Wang, Shuang Positioning Error Analysis and Control of a Piezo-Driven 6-DOF Micro-Positioner |
title | Positioning Error Analysis and Control of a Piezo-Driven 6-DOF Micro-Positioner |
title_full | Positioning Error Analysis and Control of a Piezo-Driven 6-DOF Micro-Positioner |
title_fullStr | Positioning Error Analysis and Control of a Piezo-Driven 6-DOF Micro-Positioner |
title_full_unstemmed | Positioning Error Analysis and Control of a Piezo-Driven 6-DOF Micro-Positioner |
title_short | Positioning Error Analysis and Control of a Piezo-Driven 6-DOF Micro-Positioner |
title_sort | positioning error analysis and control of a piezo-driven 6-dof micro-positioner |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6722792/ https://www.ncbi.nlm.nih.gov/pubmed/31426503 http://dx.doi.org/10.3390/mi10080542 |
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