Energy Loss in a MEMS Disk Resonator Gyroscope

Analysing and minimizing energy loss is crucial for high performance disk resonator gyroscopes (DRGs). Generally, the primary energy loss mechanism for high vacuum packaged microelectromechanical system (MEMS) resonators includes thermoelastic damping, anchor loss, and electronic damping. In this pa...

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Detalles Bibliográficos
Autores principales: Xie, Jianbing, Hao, Yongcun, Yuan, Weizheng
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6723098/
https://www.ncbi.nlm.nih.gov/pubmed/31344925
http://dx.doi.org/10.3390/mi10080493

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6723098/
https://www.ncbi.nlm.nih.gov/pubmed/31344925
http://dx.doi.org/10.3390/mi10080493

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