A Review: Preparation, Performance, and Applications of Silicon Oxynitride Film

Silicon oxynitride (SiN(x)O(y)) is a highly promising functional material for its luminescence performance and tunable refractive index, which has wide applications in optical devices, non-volatile memory, barrier layer, and scratch-resistant coatings. This review presents recent developments, and d...

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Detalles Bibliográficos
Autores principales: Shi, Yue, He, Liang, Guang, Fangcao, Li, Luhai, Xin, Zhiqing, Liu, Ruping
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Review
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6723468/
https://www.ncbi.nlm.nih.gov/pubmed/31434246
http://dx.doi.org/10.3390/mi10080552

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6723468/
https://www.ncbi.nlm.nih.gov/pubmed/31434246
http://dx.doi.org/10.3390/mi10080552

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