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A Review: Preparation, Performance, and Applications of Silicon Oxynitride Film
Silicon oxynitride (SiN(x)O(y)) is a highly promising functional material for its luminescence performance and tunable refractive index, which has wide applications in optical devices, non-volatile memory, barrier layer, and scratch-resistant coatings. This review presents recent developments, and d...
| Autores principales: | , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2019
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6723468/ https://www.ncbi.nlm.nih.gov/pubmed/31434246 http://dx.doi.org/10.3390/mi10080552 |