Conformal High-K Dielectric Coating of Suspended Single-Walled Carbon Nanotubes by Atomic Layer Deposition

As one of the highest mobility semiconductor materials, carbon nanotubes (CNTs) have been extensively studied for use in field effect transistors (FETs). To fabricate surround-gate FETs— which offer the best switching performance—deposition of conformal, weakly-interacting dielectric layers is neces...

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Detalles Bibliográficos
Autores principales: Kemelbay, Aidar, Tikhonov, Alexander, Aloni, Shaul, Kuykendall, Tevye R.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6723932/
https://www.ncbi.nlm.nih.gov/pubmed/31357733
http://dx.doi.org/10.3390/nano9081085

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6723932/
https://www.ncbi.nlm.nih.gov/pubmed/31357733
http://dx.doi.org/10.3390/nano9081085

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