A high efficiency silicon nitride waveguide grating coupler with a multilayer bottom reflector

We propose a high efficiency apodized grating coupler with a bottom reflector for silicon nitride photonic integrated circuits. The reflector consists of a stack of alternate silicon nitride and silicon dioxide quarter-wave films. The design, fabrication and optical characterization of the couplers...

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Detalles Bibliográficos
Autores principales: Hong, Jianxun, Spring, Andrew M., Qiu, Feng, Yokoyama, Shiyoshi
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6736935/
https://www.ncbi.nlm.nih.gov/pubmed/31506482
http://dx.doi.org/10.1038/s41598-019-49324-5

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6736935/
https://www.ncbi.nlm.nih.gov/pubmed/31506482
http://dx.doi.org/10.1038/s41598-019-49324-5

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