A high efficiency silicon nitride waveguide grating coupler with a multilayer bottom reflector

We propose a high efficiency apodized grating coupler with a bottom reflector for silicon nitride photonic integrated circuits. The reflector consists of a stack of alternate silicon nitride and silicon dioxide quarter-wave films. The design, fabrication and optical characterization of the couplers...

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Detalles Bibliográficos
Autores principales: Hong, Jianxun, Spring, Andrew M., Qiu, Feng, Yokoyama, Shiyoshi
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6736935/
https://www.ncbi.nlm.nih.gov/pubmed/31506482
http://dx.doi.org/10.1038/s41598-019-49324-5
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author Hong, Jianxun
Spring, Andrew M.
Qiu, Feng
Yokoyama, Shiyoshi
author_facet Hong, Jianxun
Spring, Andrew M.
Qiu, Feng
Yokoyama, Shiyoshi
author_sort Hong, Jianxun
collection PubMed
description We propose a high efficiency apodized grating coupler with a bottom reflector for silicon nitride photonic integrated circuits. The reflector consists of a stack of alternate silicon nitride and silicon dioxide quarter-wave films. The design, fabrication and optical characterization of the couplers has been presented. The measured fiber to detector insertion loss was −3.5 dB which corresponds to a peak coupling efficiency of −1.75 dB. A 3 dB wavelength bandwidth of 76.34 nm was demonstrated for the grating coupler with a 20-layer reflector. The fabrication process is CMOS-compatible and requires only a single etching step.
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spelling pubmed-67369352019-09-20 A high efficiency silicon nitride waveguide grating coupler with a multilayer bottom reflector Hong, Jianxun Spring, Andrew M. Qiu, Feng Yokoyama, Shiyoshi Sci Rep Article We propose a high efficiency apodized grating coupler with a bottom reflector for silicon nitride photonic integrated circuits. The reflector consists of a stack of alternate silicon nitride and silicon dioxide quarter-wave films. The design, fabrication and optical characterization of the couplers has been presented. The measured fiber to detector insertion loss was −3.5 dB which corresponds to a peak coupling efficiency of −1.75 dB. A 3 dB wavelength bandwidth of 76.34 nm was demonstrated for the grating coupler with a 20-layer reflector. The fabrication process is CMOS-compatible and requires only a single etching step. Nature Publishing Group UK 2019-09-10 /pmc/articles/PMC6736935/ /pubmed/31506482 http://dx.doi.org/10.1038/s41598-019-49324-5 Text en © The Author(s) 2019 Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/.
spellingShingle Article
Hong, Jianxun
Spring, Andrew M.
Qiu, Feng
Yokoyama, Shiyoshi
A high efficiency silicon nitride waveguide grating coupler with a multilayer bottom reflector
title A high efficiency silicon nitride waveguide grating coupler with a multilayer bottom reflector
title_full A high efficiency silicon nitride waveguide grating coupler with a multilayer bottom reflector
title_fullStr A high efficiency silicon nitride waveguide grating coupler with a multilayer bottom reflector
title_full_unstemmed A high efficiency silicon nitride waveguide grating coupler with a multilayer bottom reflector
title_short A high efficiency silicon nitride waveguide grating coupler with a multilayer bottom reflector
title_sort high efficiency silicon nitride waveguide grating coupler with a multilayer bottom reflector
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6736935/
https://www.ncbi.nlm.nih.gov/pubmed/31506482
http://dx.doi.org/10.1038/s41598-019-49324-5
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