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Surface acoustic wave photonic devices in silicon on insulator

Opto-mechanical interactions in planar photonic integrated circuits draw great interest in basic research and applications. However, opto-mechanics is practically absent in the most technologically significant photonics platform: silicon on insulator. Previous demonstrations required the under-etchi...

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Detalles Bibliográficos
Autores principales: Munk, Dvir, Katzman, Moshe, Hen, Mirit, Priel, Maayan, Feldberg, Moshe, Sharabani, Tali, Levy, Shahar, Bergman, Arik, Zadok, Avi
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2019
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6746697/
https://www.ncbi.nlm.nih.gov/pubmed/31527635
http://dx.doi.org/10.1038/s41467-019-12157-x