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Electrochemical Nanolithography on Silicon: An Easy and Scalable Method to Control Pore Formation at the Nanoscale

Lithography on a sub-100 nm scale is beyond the diffraction limits of standard optical lithography but is nonetheless a key step in many modern technological applications. At this length scale, there are several possible approaches that require either the preliminary surface deposition of materials...

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Autores principales: Pinna, Elisa, Mehrabanian, Mehran, Redolfi Riva, Eugenio, Cara, Eleonora, Aprile, Giulia, Boarino, Luca, Mula, Guido
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6766228/
https://www.ncbi.nlm.nih.gov/pubmed/31500223
http://dx.doi.org/10.3390/ma12182891
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author Pinna, Elisa
Mehrabanian, Mehran
Redolfi Riva, Eugenio
Cara, Eleonora
Aprile, Giulia
Boarino, Luca
Mula, Guido
author_facet Pinna, Elisa
Mehrabanian, Mehran
Redolfi Riva, Eugenio
Cara, Eleonora
Aprile, Giulia
Boarino, Luca
Mula, Guido
author_sort Pinna, Elisa
collection PubMed
description Lithography on a sub-100 nm scale is beyond the diffraction limits of standard optical lithography but is nonetheless a key step in many modern technological applications. At this length scale, there are several possible approaches that require either the preliminary surface deposition of materials or the use of expensive and time-consuming techniques. In our approach, we demonstrate a simple process, easily scalable to large surfaces, where the surface patterning that controls pore formation on highly doped silicon wafers is obtained by an electrochemical process. This method joins the advantages of the low cost of an electrochemical approach with its immediate scalability to large wafers.
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spelling pubmed-67662282019-09-30 Electrochemical Nanolithography on Silicon: An Easy and Scalable Method to Control Pore Formation at the Nanoscale Pinna, Elisa Mehrabanian, Mehran Redolfi Riva, Eugenio Cara, Eleonora Aprile, Giulia Boarino, Luca Mula, Guido Materials (Basel) Article Lithography on a sub-100 nm scale is beyond the diffraction limits of standard optical lithography but is nonetheless a key step in many modern technological applications. At this length scale, there are several possible approaches that require either the preliminary surface deposition of materials or the use of expensive and time-consuming techniques. In our approach, we demonstrate a simple process, easily scalable to large surfaces, where the surface patterning that controls pore formation on highly doped silicon wafers is obtained by an electrochemical process. This method joins the advantages of the low cost of an electrochemical approach with its immediate scalability to large wafers. MDPI 2019-09-07 /pmc/articles/PMC6766228/ /pubmed/31500223 http://dx.doi.org/10.3390/ma12182891 Text en © 2019 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Pinna, Elisa
Mehrabanian, Mehran
Redolfi Riva, Eugenio
Cara, Eleonora
Aprile, Giulia
Boarino, Luca
Mula, Guido
Electrochemical Nanolithography on Silicon: An Easy and Scalable Method to Control Pore Formation at the Nanoscale
title Electrochemical Nanolithography on Silicon: An Easy and Scalable Method to Control Pore Formation at the Nanoscale
title_full Electrochemical Nanolithography on Silicon: An Easy and Scalable Method to Control Pore Formation at the Nanoscale
title_fullStr Electrochemical Nanolithography on Silicon: An Easy and Scalable Method to Control Pore Formation at the Nanoscale
title_full_unstemmed Electrochemical Nanolithography on Silicon: An Easy and Scalable Method to Control Pore Formation at the Nanoscale
title_short Electrochemical Nanolithography on Silicon: An Easy and Scalable Method to Control Pore Formation at the Nanoscale
title_sort electrochemical nanolithography on silicon: an easy and scalable method to control pore formation at the nanoscale
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6766228/
https://www.ncbi.nlm.nih.gov/pubmed/31500223
http://dx.doi.org/10.3390/ma12182891
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