A Temperature-Insensitive Resonant Pressure Micro Sensor Based on Silicon-on-Glass Vacuum Packaging

This paper presents a temperature-insensitive resonant pressure sensor, which is mainly composed of a silicon-on-insulator (SOI) wafer for pressure measurements and a silicon-on-glass (SOG) cap for vacuum packaging. The variations of pressure under measurement bend the pressure sensitive diaphragm a...

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Detalles Bibliográficos
Autores principales: Yan, Pengcheng, Lu, Yulan, Xiang, Chao, Wang, Junbo, Chen, Deyong, Chen, Jian
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6767015/
https://www.ncbi.nlm.nih.gov/pubmed/31500306
http://dx.doi.org/10.3390/s19183866

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6767015/
https://www.ncbi.nlm.nih.gov/pubmed/31500306
http://dx.doi.org/10.3390/s19183866

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