Error Analysis and Compensation of a Laser Measurement System for Simultaneously Measuring Five-Degree-of-Freedom Error Motions of Linear Stages

A robust laser measurement system (LMS), consisting of a sensor head and a detecting part, for simultaneously measuring five-degree-of-freedom (five-DOF) error motions of linear stages, is proposed and characterized. For the purpose of long-travel measurement, all possible error sources that would a...

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Detalles Bibliográficos
Autores principales: Cai, Yindi, Sang, Qi, Lou, Zhi-Feng, Fan, Kuang-Chao
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6767225/
https://www.ncbi.nlm.nih.gov/pubmed/31491908
http://dx.doi.org/10.3390/s19183833

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6767225/
https://www.ncbi.nlm.nih.gov/pubmed/31491908
http://dx.doi.org/10.3390/s19183833

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