Parametrically Amplified Low-Power MEMS Capacitive Humidity Sensor

We present the design, fabrication, and response of a polymer-based Laterally Amplified Chemo-Mechanical (LACM) humidity sensor based on mechanical leveraging and parametric amplification. The device consists of a sense cantilever asymmetrically patterned with a polymer and flanked by two stationary...

Descripción completa

Detalles Bibliográficos
Autores principales: Likhite, Rugved, Banerjee, Aishwaryadev, Majumder, Apratim, Karkhanis, Mohit, Kim, Hanseup, Mastrangelo, Carlos H.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6767347/
https://www.ncbi.nlm.nih.gov/pubmed/31540215
http://dx.doi.org/10.3390/s19183954

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6767347/
https://www.ncbi.nlm.nih.gov/pubmed/31540215
http://dx.doi.org/10.3390/s19183954

Ejemplares similares