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Parametrically Amplified Low-Power MEMS Capacitive Humidity Sensor

We present the design, fabrication, and response of a polymer-based Laterally Amplified Chemo-Mechanical (LACM) humidity sensor based on mechanical leveraging and parametric amplification. The device consists of a sense cantilever asymmetrically patterned with a polymer and flanked by two stationary...

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Detalles Bibliográficos
Autores principales:	Likhite, Rugved, Banerjee, Aishwaryadev, Majumder, Apratim, Karkhanis, Mohit, Kim, Hanseup, Mastrangelo, Carlos H.
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2019
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6767347/ https://www.ncbi.nlm.nih.gov/pubmed/31540215 http://dx.doi.org/10.3390/s19183954

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