Contactless transient carrier spectroscopy and imaging technique using lock-in free carrier emission and absorption

In this paper we present a contactless transient carrier spectroscopy and imaging technique for traps in silicon. At each pixel, we fit the transient decay of the trap emission which allows us to obtain both the trap time constant and trap concentration. Here we show that this technique allows for h...

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Detalles Bibliográficos
Autores principales: Rougieux, Fiacre E., Kwapil, Wolfram, Heinz, Friedemann, Siriwardhana, Manjula, Schubert, Martin C.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6776499/
https://www.ncbi.nlm.nih.gov/pubmed/31582760
http://dx.doi.org/10.1038/s41598-019-49804-8
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author Rougieux, Fiacre E.
Kwapil, Wolfram
Heinz, Friedemann
Siriwardhana, Manjula
Schubert, Martin C.
author_facet Rougieux, Fiacre E.
Kwapil, Wolfram
Heinz, Friedemann
Siriwardhana, Manjula
Schubert, Martin C.
author_sort Rougieux, Fiacre E.
collection PubMed
description In this paper we present a contactless transient carrier spectroscopy and imaging technique for traps in silicon. At each pixel, we fit the transient decay of the trap emission which allows us to obtain both the trap time constant and trap concentration. Here we show that this technique allows for high-resolution images. Furthermore, this technique also allows to discriminate between the presence of thermal donors or oxygen precipitates in as-grown wafers, without requiring a thermal donor killing step.
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spelling pubmed-67764992019-10-09 Contactless transient carrier spectroscopy and imaging technique using lock-in free carrier emission and absorption Rougieux, Fiacre E. Kwapil, Wolfram Heinz, Friedemann Siriwardhana, Manjula Schubert, Martin C. Sci Rep Article In this paper we present a contactless transient carrier spectroscopy and imaging technique for traps in silicon. At each pixel, we fit the transient decay of the trap emission which allows us to obtain both the trap time constant and trap concentration. Here we show that this technique allows for high-resolution images. Furthermore, this technique also allows to discriminate between the presence of thermal donors or oxygen precipitates in as-grown wafers, without requiring a thermal donor killing step. Nature Publishing Group UK 2019-10-03 /pmc/articles/PMC6776499/ /pubmed/31582760 http://dx.doi.org/10.1038/s41598-019-49804-8 Text en © The Author(s) 2019 Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/.
spellingShingle Article
Rougieux, Fiacre E.
Kwapil, Wolfram
Heinz, Friedemann
Siriwardhana, Manjula
Schubert, Martin C.
Contactless transient carrier spectroscopy and imaging technique using lock-in free carrier emission and absorption
title Contactless transient carrier spectroscopy and imaging technique using lock-in free carrier emission and absorption
title_full Contactless transient carrier spectroscopy and imaging technique using lock-in free carrier emission and absorption
title_fullStr Contactless transient carrier spectroscopy and imaging technique using lock-in free carrier emission and absorption
title_full_unstemmed Contactless transient carrier spectroscopy and imaging technique using lock-in free carrier emission and absorption
title_short Contactless transient carrier spectroscopy and imaging technique using lock-in free carrier emission and absorption
title_sort contactless transient carrier spectroscopy and imaging technique using lock-in free carrier emission and absorption
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6776499/
https://www.ncbi.nlm.nih.gov/pubmed/31582760
http://dx.doi.org/10.1038/s41598-019-49804-8
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