A Silicon Resonant Accelerometer Embedded in An Isolation Frame with Stress Relief Anchor

Bias thermal sensitivity is a significant performance parameter of a silicon resonant accelerometer (SRA) and is normally used to evaluate the degree of engineering practicability. Theoretical analysis demonstrates that temperature-induced stress is the dominant factor that determines the bias tempe...

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Detalles Bibliográficos
Autores principales: Cui, Jian, Yang, Haibing, Li, Dong, Song, Ziyang, Zhao, Qiancheng
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6780627/
https://www.ncbi.nlm.nih.gov/pubmed/31470623
http://dx.doi.org/10.3390/mi10090571

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6780627/
https://www.ncbi.nlm.nih.gov/pubmed/31470623
http://dx.doi.org/10.3390/mi10090571

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