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A Silicon Resonant Accelerometer Embedded in An Isolation Frame with Stress Relief Anchor
Bias thermal sensitivity is a significant performance parameter of a silicon resonant accelerometer (SRA) and is normally used to evaluate the degree of engineering practicability. Theoretical analysis demonstrates that temperature-induced stress is the dominant factor that determines the bias tempe...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2019
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6780627/ https://www.ncbi.nlm.nih.gov/pubmed/31470623 http://dx.doi.org/10.3390/mi10090571 |