Resonant Pressure Micro Sensors Based on Dual Double Ended Tuning Fork Resonators

This paper presents resonant pressure micro sensors based on dual double ended tuning fork (DETF) resonators, which are electrostatically excited and piezoresistively detected. In operation, the barometric pressure under measurement bends the pressure sensitive diaphragm functioning as the anchor of...

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Detalles Bibliográficos
Autores principales: Lu, Yulan, Zhang, Sen, Yan, Pengcheng, Li, Yadong, Yu, Jie, Chen, Deyong, Wang, Junbo, Xie, Bo, Chen, Jian
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6780867/
https://www.ncbi.nlm.nih.gov/pubmed/31450871
http://dx.doi.org/10.3390/mi10090560

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6780867/
https://www.ncbi.nlm.nih.gov/pubmed/31450871
http://dx.doi.org/10.3390/mi10090560

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