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Resonant Pressure Micro Sensors Based on Dual Double Ended Tuning Fork Resonators
This paper presents resonant pressure micro sensors based on dual double ended tuning fork (DETF) resonators, which are electrostatically excited and piezoresistively detected. In operation, the barometric pressure under measurement bends the pressure sensitive diaphragm functioning as the anchor of...
| Autores principales: | , , , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2019
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6780867/ https://www.ncbi.nlm.nih.gov/pubmed/31450871 http://dx.doi.org/10.3390/mi10090560 |